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INMOS
UCSB and UCLA will each build user facilities designed for linking top-down semiconductor fabrication with biologically and chemically assembled molecular materials. The new facilities will complement and enhance existing infrastructure at both campuses. The current UCSB facility, part of the NSF National Nanofabrication Network, is primarily designed for compound semiconductors. The expanded facility would enable the coupling of (bio)molecular, biomimetic and mesoporous materials with NEMS. The current UCLA silicon fabrication facility will be expanded to couple silicon processing with (bio)molecules and physiologically active cells. Both campuses will focus their efforts on process development rather than just device fabrication.
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